Wolfgang Osten
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Optical Inspection of MicrosystemsWolfgang OstenISBN:9780849336829Publisher:CRC Pr I LlcPublication Date:2006Binding:HardcoverSynopsis: High quality standards are particularly troublesome for MEMS designers, where products used in medicine and safety technology are held to extremely stringent standards. Manufacturers of microsystems need measurement and inspection techniques that are fast, robust, and low cost relative to the cost of product being developed. Optical Inspection of Microsystems offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents several methods of optical analysis and enumerates their basic components. More About this Book | View All Listings | View Collectible Listings Other editions: Softcover - 2007, Softcover - 2005, Softcover - 2003, Softcover - 2002, Softcover - 2001, Softcover - 2001, Hardcover - 1998, Softcover - 1990, 1982 |
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