9780819441119
Photomask and Next-generation Lithography Mask Technology VIII
Photomask Japan; Society of Photo-Optical Instrumentation Engineers; Bacus (Technical Group); Oyo Butsuri Gakkai
ISBN 10: 0819441112 / 0-8194-4111-2
ISBN 13: 9780819441119
Publisher: Society of Photo Optical
Publication Date: 2001
Binding: Softcover
ISBN 13: 9780819441119
Publisher: Society of Photo Optical
Publication Date: 2001
Binding: Softcover
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