9781566774598

Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Dielectrics VIII 2005

R. E. Sah; J. Zhang; M. J. Deen; Yasuku Kamakura; J. Yota

ISBN 10: 1566774594 / 1-56677-459-4
ISBN 13: 9781566774598
Publisher: Electrochemical Society
Publication Date: 2005
Binding: Hardcover