Principles of Growth and Processing of Semiconductors

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9780070396050: Principles of Growth and Processing of Semiconductors

A senior/graduate text on the growth and processing of semiconductor materials (semiconductor fabrication) that will expose material/electrical and chemical engineering majors to the principles underlying the fabrication of state-of-the-art integrated circuits and their applications.

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Mahajan, Subash
Published by McGraw-Hill Science/Engineerin (1998)
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