Micromachined Transducers Sourcebook

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9780072907223: Micromachined Transducers Sourcebook
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This is the first textbook to provide a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. The book takes a practical approach to the subject and studies key design issues by examining the fabrication of different devices.

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9780071164627: Micromachined Transducers Sourcebook

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ISBN 10:  0071164626 ISBN 13:  9780071164627
Publisher: McGraw-Hill Inc.,US, 2000
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