Micromachined Transducers Sourcebook

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9780072907223: Micromachined Transducers Sourcebook

This is the first textbook to provide a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. The book takes a practical approach to the subject and studies key design issues by examining the fabrication of different devices.

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Kovacs, Gregory T.
Published by McGraw-Hill Science/Engineerin (1998)
ISBN 10: 0072907223 ISBN 13: 9780072907223
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Published by McGraw-Hill Science/Engineerin (1998)
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