Laser Microfabrication: Thin Film Processes and Lithography

0 avg rating
( 0 ratings by Goodreads )
9780122334306: Laser Microfabrication: Thin Film Processes and Lithography

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

"synopsis" may belong to another edition of this title.

Review:

A good balance between science and practice, well-established and very new data....The importance of this monograph lies in the title itself, since microelectronics today is a driving force of progress in science and technology....I think that anyone who wants to understand this field of practical laser chemistry should have a copy. It is also useful to study because it raises many new questions about elementary laser-induced reactions on surfaces and thereby stimulates progress in the field.
--VLADILEN S. LETOKHOV, PROFESSOR AND HEAD OF DEPARTMENT, INSTITUTE OF SPECTROSCOPY OF USSR ACADEMY OF SCIENCES, TROITZK. IN OPTICS AND PHOTONICS NEWS.
Laser Microfabrication' is an impressive volume detailing the expanding field of laser-assisted patterned chemical processing of surfaces. This volume would be a valuable addition to the library of any researcher in laser-assisted microfabrication. It would also serve as an excellent introduction to the field for those with minimal background in lasers, thin-film processing,, and lithography.
--MRS BULLETIN
With contributions from 16 experts in this country and the United Kingdom, this book contains a great wealth of information, covering the wide field of laser microfabrication processes....delightful and informative reading. It should be useful for both starting students and active researchers, as the editors state in the preface.
--JOURNAL OF SPIE
This text provides a comprehensive introduction to the field of laser microchemical processing. It is largely tutorial in nature covering everything from optics to chemical reaction kinetics to actual semiconductor processing applications. It contains references to much of the original work and thus not only brings the reader up to date on current research but gives perspective to the field in general. As such, this book should be valuable not only to the newcomer to this research, but should also be useful to the oldtimer....It is obvious that the editors worked very hard, not only to put together a coherent presentation of this subject but to make it comprehensive as well.
--NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH
The book contains much basic science, together with details of applications and I found it to be an informative reference source....There are good figures and tables and all the references include the titles of the articles. I recommend this book as an expert, up-to-date account of its field for persons interested in laser interactions with solid surfaces both on the fundamental level and in obtaining details of microfabrication technology.
--AUSTRALIAN PHYSICIST
The fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past years is reviewed in a convenient format, which serves as a starting point for students and researchers to learn about the field.
Laser Microfabrication provides a good reference to work already done and to the major problems remaining to be solved. Laser engineers should benefit from the information if they are attempting to develop products for this industry. Semiconductor engineers will find the information valuable if they want to be involved in state-of-the-art microfabrication processes.
--LASER FOCUS WORLD

"About this title" may belong to another edition of this title.

Buy New View Book
List Price: US$ 93.95
US$ 56.55

Convert Currency

Shipping: US$ 3.83
From United Kingdom to U.S.A.

Destination, Rates & Speeds

Add to Basket

Top Search Results from the AbeBooks Marketplace

1.

Daniel J. Ehrlich, Jeffrey Y. Tsao
Published by Academic Press 1989-06-21 (1989)
ISBN 10: 0122334302 ISBN 13: 9780122334306
New Hardcover Quantity Available: 5
Seller
Chiron Media
(Wallingford, United Kingdom)
Rating
[?]

Book Description Academic Press 1989-06-21, 1989. Hardcover. Book Condition: New. Bookseller Inventory # NU-ELS-00002407

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 56.55
Convert Currency

Add to Basket

Shipping: US$ 3.83
From United Kingdom to U.S.A.
Destination, Rates & Speeds

2.

D. J. Ehrlich, Jeffrey Y. Tsao
Published by Elsevier Science Publishing Co Inc, United States (1989)
ISBN 10: 0122334302 ISBN 13: 9780122334306
New Hardcover Quantity Available: 1
Seller
The Book Depository US
(London, United Kingdom)
Rating
[?]

Book Description Elsevier Science Publishing Co Inc, United States, 1989. Hardback. Book Condition: New. 237 x 159 mm. Language: English . Brand New Book. This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher. Bookseller Inventory # AA59780122334306

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 61.40
Convert Currency

Add to Basket

Shipping: FREE
From United Kingdom to U.S.A.
Destination, Rates & Speeds

3.

D. J. Ehrlich, Jeffrey Y. Tsao
Published by Elsevier Science Publishing Co Inc, United States (1989)
ISBN 10: 0122334302 ISBN 13: 9780122334306
New Hardcover Quantity Available: 1
Seller
The Book Depository
(London, United Kingdom)
Rating
[?]

Book Description Elsevier Science Publishing Co Inc, United States, 1989. Hardback. Book Condition: New. 237 x 159 mm. Language: English . Brand New Book. This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher. Bookseller Inventory # AA59780122334306

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 62.38
Convert Currency

Add to Basket

Shipping: FREE
From United Kingdom to U.S.A.
Destination, Rates & Speeds

4.

Published by Academic Press
ISBN 10: 0122334302 ISBN 13: 9780122334306
New Hardcover Quantity Available: 1
Seller
Cloud 9 Books
(Wellington, FL, U.S.A.)
Rating
[?]

Book Description Academic Press. Hardcover. Book Condition: New. 0122334302 New Condition. Bookseller Inventory # NEW6.0040149

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 74.88
Convert Currency

Add to Basket

Shipping: US$ 4.99
Within U.S.A.
Destination, Rates & Speeds

5.

Ehrlich, Daniel J./ Tsao, Jeffrey Y. (Editor)
Published by Academic Pr (1989)
ISBN 10: 0122334302 ISBN 13: 9780122334306
New Hardcover Quantity Available: 1
Seller
Revaluation Books
(Exeter, United Kingdom)
Rating
[?]

Book Description Academic Pr, 1989. Hardcover. Book Condition: Brand New. 1st edition. 587 pages. 9.75x6.75x1.25 inches. In Stock. Bookseller Inventory # __0122334302

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 73.88
Convert Currency

Add to Basket

Shipping: US$ 7.68
From United Kingdom to U.S.A.
Destination, Rates & Speeds

6.

EHRLICH, DANIEL; TSAO, JEFFREY
Published by Academic Press (1989)
ISBN 10: 0122334302 ISBN 13: 9780122334306
New Hardcover Quantity Available: 1
Seller
Herb Tandree Philosophy Books
(Stroud, GLOS, United Kingdom)
Rating
[?]

Book Description Academic Press, 1989. Hardback. Book Condition: NEW. 9780122334306 This listing is a new book, a title currently in-print which we order directly and immediately from the publisher. Bookseller Inventory # HTANDREE0891207

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 75.18
Convert Currency

Add to Basket

Shipping: US$ 10.24
From United Kingdom to U.S.A.
Destination, Rates & Speeds

7.

EHRLICH, DANIEL; TSAO, JEFFREY
Published by Academic Press (1989)
ISBN 10: 0122334302 ISBN 13: 9780122334306
New Hardcover Quantity Available: 1
Seller
Herb Tandree Philosophy Books
(Stroud, GLOS, United Kingdom)
Rating
[?]

Book Description Academic Press, 1989. Hardback. Book Condition: NEW. 9780122334306 This listing is a new book, a title currently in-print which we order directly and immediately from the publisher. Bookseller Inventory # HTANDREE01195498

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 75.18
Convert Currency

Add to Basket

Shipping: US$ 10.24
From United Kingdom to U.S.A.
Destination, Rates & Speeds

8.

Published by Academic Press (1989)
ISBN 10: 0122334302 ISBN 13: 9780122334306
New Hardcover Quantity Available: 1
Seller
Irish Booksellers
(Rumford, ME, U.S.A.)
Rating
[?]

Book Description Academic Press, 1989. Hardcover. Book Condition: New. book. Bookseller Inventory # 0122334302

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 92.12
Convert Currency

Add to Basket

Shipping: FREE
Within U.S.A.
Destination, Rates & Speeds

9.

Daniel J. Ehrlich (Editor), Jeffrey Y. Tsao (Editor)
Published by Academic Press (1989)
ISBN 10: 0122334302 ISBN 13: 9780122334306
New Hardcover Quantity Available: 1
Seller
Ergodebooks
(RICHMOND, TX, U.S.A.)
Rating
[?]

Book Description Academic Press, 1989. Hardcover. Book Condition: New. 1. Bookseller Inventory # DADAX0122334302

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 93.85
Convert Currency

Add to Basket

Shipping: US$ 3.99
Within U.S.A.
Destination, Rates & Speeds

10.

Editor-Daniel J. Ehrlich; Editor-Jeffrey Y. Tsao
Published by Academic Press (1989)
ISBN 10: 0122334302 ISBN 13: 9780122334306
New Hardcover Quantity Available: 1
Seller
Ergodebooks
(RICHMOND, TX, U.S.A.)
Rating
[?]

Book Description Academic Press, 1989. Hardcover. Book Condition: New. Bookseller Inventory # SONG0122334302

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 127.16
Convert Currency

Add to Basket

Shipping: US$ 3.99
Within U.S.A.
Destination, Rates & Speeds

There are more copies of this book

View all search results for this book