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This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
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- PublisherAcademic Press
- Publication date2012
- ISBN 10 0124119891
- ISBN 13 9780124119895
- BindingPaperback
- Number of pages440
- EditorFair Richard B.
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Rapid Thermal Processing: Science and Technology
Published by
Academic Press
(2012)
ISBN 10: 0124119891
ISBN 13: 9780124119895
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Paperback
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Rating
Book Description Paperback. Condition: Brand New. 440 pages. 9.00x6.00x1.00 inches. In Stock. Seller Inventory # zk0124119891
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