Plasma Etching: An Introduction (Plasma : Materials Interactions)

5 avg rating
( 1 ratings by Goodreads )
 
9780124693708: Plasma Etching: An Introduction (Plasma : Materials Interactions)
View all copies of this ISBN edition:
 
 

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.

"synopsis" may belong to another edition of this title.

Review:

"The subject matter is therefore well tuned to the needs of workers in the semiconductor industry, although it would also serve as an excellent textbook for a final undergraduate year or postgraduate course on the processing of semiconductor materials. This book is strongly recommended for the libraries of all universities and research laboratories working in the physical sciences."
--AUSTRALIAN PHYSICIST
[The authors] have produced a comprehensive and very readable book that will be especially valuable to the scientist or engineer just entering the field. The emphasis is clearly on understanding fundamental phenomena rather than specific recipes, thus its utility will outlive the present generation of processes and equipment.
--NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH, Section B: Beam Interactions with Materials and Atoms
...They have produced a comprehensive and very readable book that will be especially vauable to the scientist or engineer just entering the field. The emphasis is clearly on understanding fundamental phenomena rather than specific recipes, thus its utility will outlive the present generation of processes and equipment.
--Thomas M. Mayer
SANDIA NATIONAL LABORATORIES
Good discussions of plasma chemistry, plasma diagnostics and handling hazardous gases used in plasmas.
--SOCIETY OF VACUUM COATERS

"About this title" may belong to another edition of this title.

Other Popular Editions of the Same Title

9780123959669: Plasma Etching: An Introduction

Featured Edition

ISBN 10:  0123959667 ISBN 13:  9780123959669
Publisher: Academic Press, 2016
Softcover

Top Search Results from the AbeBooks Marketplace

1.

Editor-Dennis M. Manos; Editor-Daniel L. Flamm
Published by Academic Press (1989)
ISBN 10: 0124693709 ISBN 13: 9780124693708
New Hardcover Quantity Available: 1
Seller:
Ergodebooks
(RICHMOND, TX, U.S.A.)
Rating
[?]

Book Description Academic Press, 1989. Hardcover. Condition: New. Seller Inventory # SONG0124693709

More information about this seller | Contact this seller

Buy New
US$ 15.93
Convert currency

Add to Basket

Shipping: US$ 3.99
Within U.S.A.
Destination, rates & speeds

2.

Published by Academic Press (1989)
ISBN 10: 0124693709 ISBN 13: 9780124693708
New Hardcover Quantity Available: 1
Seller:
Irish Booksellers
(Portland, ME, U.S.A.)
Rating
[?]

Book Description Academic Press, 1989. Condition: New. book. Seller Inventory # M0124693709

More information about this seller | Contact this seller

Buy New
US$ 30.55
Convert currency

Add to Basket

Shipping: US$ 3.27
Within U.S.A.
Destination, rates & speeds

3.

Published by Academic Press
ISBN 10: 0124693709 ISBN 13: 9780124693708
New Hardcover Quantity Available: 1
Seller:
Cloud 9 Books
(Wellington, FL, U.S.A.)
Rating
[?]

Book Description Academic Press. Hardcover. Condition: New. 0124693709 New Condition. Seller Inventory # NEW99.3033653

More information about this seller | Contact this seller

Buy New
US$ 47.49
Convert currency

Add to Basket

Shipping: US$ 4.99
Within U.S.A.
Destination, rates & speeds

4.

Published by Elsevier Science Publishing Co Inc, United States (1989)
ISBN 10: 0124693709 ISBN 13: 9780124693708
New Hardcover Quantity Available: 10
Seller:
Book Depository hard to find
(London, United Kingdom)
Rating
[?]

Book Description Elsevier Science Publishing Co Inc, United States, 1989. Hardback. Condition: New. Language: English. Brand new Book. Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods. Seller Inventory # EOD9780124693708

More information about this seller | Contact this seller

Buy New
US$ 54.85
Convert currency

Add to Basket

Shipping: FREE
From United Kingdom to U.S.A.
Destination, rates & speeds

5.

MANOS, DENNIS; FLAMM, DANIEL
Published by Academic Press (1989)
ISBN 10: 0124693709 ISBN 13: 9780124693708
New Hardcover Quantity Available: 1
Seller:
Herb Tandree Philosophy Books
(Stroud, GLOS, United Kingdom)
Rating
[?]

Book Description Academic Press, 1989. Hardback. Condition: NEW. 9780124693708 This listing is a new book, a title currently in-print which we order directly and immediately from the publisher. For all enquiries, please contact Herb Tandree Philosophy Books directly - customer service is our primary goal. Seller Inventory # HTANDREE0894829

More information about this seller | Contact this seller

Buy New
US$ 66.22
Convert currency

Add to Basket

Shipping: US$ 10.29
From United Kingdom to U.S.A.
Destination, rates & speeds

6.

Manos, Dennis M.
Published by Academic Press (1989)
ISBN 10: 0124693709 ISBN 13: 9780124693708
New Quantity Available: > 20
Print on Demand
Seller:
Paperbackshop-US
(Wood Dale, IL, U.S.A.)
Rating
[?]

Book Description Academic Press, 1989. HRD. Condition: New. New Book. Shipped from US within 10 to 14 business days. THIS BOOK IS PRINTED ON DEMAND. Established seller since 2000. Seller Inventory # IQ-9780124693708

More information about this seller | Contact this seller

Buy New
US$ 74.04
Convert currency

Add to Basket

Shipping: US$ 3.99
Within U.S.A.
Destination, rates & speeds

7.

Dennis M. Manos (Editor), Daniel L. Flamm (Editor)
Published by Academic Press (1989)
ISBN 10: 0124693709 ISBN 13: 9780124693708
New Hardcover Quantity Available: 1
Seller:
Ergodebooks
(RICHMOND, TX, U.S.A.)
Rating
[?]

Book Description Academic Press, 1989. Hardcover. Condition: New. 1. Seller Inventory # DADAX0124693709

More information about this seller | Contact this seller

Buy New
US$ 76.85
Convert currency

Add to Basket

Shipping: US$ 3.99
Within U.S.A.
Destination, rates & speeds

8.

Manos, Dennis M.
Published by Academic Press (1989)
ISBN 10: 0124693709 ISBN 13: 9780124693708
New Quantity Available: > 20
Print on Demand
Seller:
Books2Anywhere
(Fairford, GLOS, United Kingdom)
Rating
[?]

Book Description Academic Press, 1989. HRD. Condition: New. New Book. Delivered from our UK warehouse in 4 to 14 business days. THIS BOOK IS PRINTED ON DEMAND. Established seller since 2000. Seller Inventory # IQ-9780124693708

More information about this seller | Contact this seller

Buy New
US$ 76.19
Convert currency

Add to Basket

Shipping: US$ 11.57
From United Kingdom to U.S.A.
Destination, rates & speeds

9.

Dennis M. Manos, Daniel L. Flamm
Published by Academic Press 1989-09-08 (1989)
ISBN 10: 0124693709 ISBN 13: 9780124693708
New Hardcover Quantity Available: 5
Seller:
Chiron Media
(Wallingford, United Kingdom)
Rating
[?]

Book Description Academic Press 1989-09-08, 1989. Hardcover. Condition: New. Seller Inventory # NU-ELSPD-00005845

More information about this seller | Contact this seller

Buy New
US$ 53.65
Convert currency

Add to Basket

Shipping: US$ 38.57
From United Kingdom to U.S.A.
Destination, rates & speeds

10.

ISBN 10: 0124693709 ISBN 13: 9780124693708
New Quantity Available: 1
Seller:
BennettBooksLtd
(San Diego, CA, U.S.A.)
Rating
[?]

Book Description Condition: New. New. Seller Inventory # STR-0124693709

More information about this seller | Contact this seller

Buy New
US$ 94.21
Convert currency

Add to Basket

Shipping: US$ 4.95
Within U.S.A.
Destination, rates & speeds

There are more copies of this book

View all search results for this book