Plasma Etching: An Introduction (Plasma -- Materials Interactions)

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9780124693708: Plasma Etching: An Introduction (Plasma -- Materials Interactions)

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.

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Editor-Dennis M. Manos; Editor-Daniel L. Flamm
Published by Academic Press (1989)
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MANOS, DENNIS; FLAMM, DANIEL
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Book Description Academic Press, 1989. Hardback. Book Condition: NEW. 9780124693708 This listing is a new book, a title currently in-print which we order directly and immediately from the publisher. Bookseller Inventory # HTANDREE0894829

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MANOS, DENNIS; FLAMM, DANIEL
Published by Academic Press (1989)
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Book Description Academic Press, 1989. Hardback. Book Condition: NEW. 9780124693708 This listing is a new book, a title currently in-print which we order directly and immediately from the publisher. Bookseller Inventory # HTANDREE01198770

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Book Description Academic Press. Book Condition: New. 0124693709 NEW US Edition COLLEGE TEXTBOOK - Let Us Take Care Of Your Textbook Needs - WE DO NOT SHIP TO AK OR HI - If you have any specific needs please contact us through the appropriate marketplace. We ship all orders within 1 business day. Bookseller Inventory # 0000796

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Published by Academic Press (1989)
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Book Description Academic Press, 1989. Book Condition: New. Brand New, Unread Copy in Perfect Condition. A+ Customer Service! Summary: D.L. Flamm and G.K. Herb, Plasma Etching Technology. An Overview. D.L. Flamm, Introduction to Plasma Chemistry. S.A. Cohen, An Introduction to Plasma Physics for Materials Processing. D.M. Manos and H.F. Dylla, Diagnostics of Plasmas for Materials Processing. A.R. Reinberg, Plasma Etch Equipment and Technology. J.M.E. Harper, Ion Beam Etching. G.K. Herb, Safety, Health, and Engineering Considerations for Plasma Processing. Bookseller Inventory # ABE_book_new_0124693709

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Book Description Academic Press. Hardcover. Book Condition: New. 0124693709 New Condition. Bookseller Inventory # NEW6.0041622

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Dennis M. Manos (Editor), Daniel L. Flamm (Editor)
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Manos, Dennis M.
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Book Description Elsevier, 2016. Paperback. Book Condition: New. PRINT ON DEMAND Book; New; Publication Year 2016; Not Signed; Fast Shipping from the UK. No. book. Bookseller Inventory # ria9780124693708_lsuk

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