RF Power for Industrial Applications

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9780130965776: RF Power for Industrial Applications

This book, the only one of its kind on the market, focuses on RF (Radio Frequency) power for use in semiconductor manufacturing equipment that generate a plasma for processing wafers. The concepts, equipment, and techniques covered in this book emphasize industrial applications, but are also applicable to most radio communications equipment. Topics covered in this unique book are: signal sources, RF power amplifier fundamentals, high power RF amplifiers, impedance matching, transmission lines, smith charts, power measurement and control, troubleshooting and maintenance of RF power systems, and industrial applications of RF power. This book is useful for engineers and technicians who install, operate, maintain, service, and repair RF power generating equipment. It is also useful for continuing education courses in company training programs, industrial training courses, or seminars and workshops.

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From the Back Cover:

This unique text emphasizes radio frequency power for industrial applications such as industrial heating, MRIs, and generating plasmas in semiconductor manufacturing equipment. RF Power for Industrial Applications presents topics from the semiconductor manufacturing perspective, making it useful for both the student and the engineer.

Users should have completed courses in DC and AC circuits, semiconductor device fundamentals, basic electronic circuits (amplifiers, power supplies, and oscillators), and basic test and measurement techniques.

The accompanying lab manual (ISBN 0-13-096576-6) provides hands-on exercises and reinforces the concepts learned in the text.

Excerpt. © Reprinted by permission. All rights reserved.:

Whenever you see the term radiofrequency (RF), it generally refers to high-frequency radio communications equipment. The term wireless is also very popular today, and wireless is RF. Although RF equipment is primarily devoted to some type of electronic communications, however, there is another entire category of RF equipment used for noncommunications industrial applications. Some examples are RF power used to generate plasmas in semiconductor manufacturing equipment, RF power used in industrial heating, and RF power used in magnetic resonance imaging (MRI) machines and in other medical equipment. Although many books have been written about RF power in communications applications, few, if any, have been written about the use of RF power in industrial applications—thus, this book. The concepts, equipment, and techniques presented in this text emphasize industrial applications but are also applicable to most radio communications equipment.

This book has three primary target audiences:

  1. Engineers and technicians in industry who install, operate, maintain, service, and repair RF power-generating equipment. This book can be used for personal continuing education or as an on-the-job reference.
  2. Students of RF power in community colleges and universities teaching a course in RF power. This book is intended as the primary text for a one-semester, 2- to 4-hour course. An accompanying lab and activities manual (ISBN 0-13-096576-6) is available for courses offering a laboratory segment. For this audience, the book meets all the workforce competencies established by the National Science Foundation-funded Maricopa Advanced Technology Education Center (MATEC) for semiconductor manufacturing technology.
  3. Engineers and technicians who seek formal continuing education in company training programs, industrial training courses, or seminars and workshops. This book provides a base on which more company- or equipment-specific courses can be developed.

Although this is a relatively complete text on RF power generation, applications, and servicing, it does assume that you have some prerequisite knowledge. If you are a student, the book assumes that you have completed courses in DC and AC circuits, semiconductor device fundamentals, basic electronic circuits such as amplifiers, power supplies, and oscillators, and basic test and measurement techniques.

If you are a technician or engineer working in industry, this text assumes that you have prior knowledge of electronic fundamentals and circuits similar to those covered in the college courses mentioned above.

ORGANIZATION OF THE TEXT

Chapter 1 surveys the primary applications for RF power in industry. This chapter also includes a section outlining the Federal Communications Commission rules and regulations regarding the use of RF power in industry. Power levels, interference, and frequency assignments are spelled out.

Chapter 2 introduces the primary signal source used in RF generators and crystal oscillators. Operation and typical configurations of frequency synthesizers, both phase-locked loop and direct digital synthesis, are discussed.

Chapter 3 covers RF power amplifiers. Circuits include class A linears, push-pull class AB and B linears, class C amplifiers, and class D and E switching amplifiers. Related impedance-matching and power divider-combiner circuits are included.

Chapter 4 continues the coverage of power amplifiers with discussions of special amplifier types, including vacuum tube amplifiers, feed-forward amplifiers, and amplifiers for UHF and microwave frequencies.

Chapter 5 deals with impedance-matching circuits. These pi, T, and L networks using inductors and capacitors are widely used to provide impedance matching between RF power amplifier stages and loads. Transformers and baluns are also covered. A key discussion in this chapter is the use of such networks in matching high-power amplifier output to the unique loads used in industrial applications.

Transmission lines are the subject of Chapter 6, with a focus on coaxial cable. Smith charts are covered in Chapter 7. Despite its age (about 65 years as this is written), the Smith chart is still widely used for transmission line and circuit design and impedance matching, and you will learn how to use it.

Chapter 8 covers RF power measurement and control. Circuits for measuring forward and reflected power, phase-magnitude, and standing wave ratio are discussed. Control circuits used in automatically varying the power of an RF generator are also covered.

Chapter 9 covers the troubleshooting, maintenance, and repair of RF generators and related equipment. Common test equipment and their applications are discussed. Troubleshooting techniques are illustrated using typical industrial commercial RF power generators, and safety issues and procedures are presented. The problems with EMI-RFI are considered and solutions are reviewed.

Chapter 10 introduces the most common applications of RF power in industry. Examples included are plasma generation in semiconductor manufacturing, industrial heating, and medical electronics such as magnetic resonance imaging (MRI).

I strongly recommend the accompanying lab and activities manual for this book. It contains material not included in the text and many hands-on activities useful in reinforcing the text material. It contains student chapter exams, activities such as Internet searches and web accesses, and various hardware lab exercises. The lab experiments can be implemented with the low-cost equipment recommended. Also included are selected Multisim (Electronics Workbench) simulations that provide further reinforcement of critical concepts. The appendices contain manufacturer resources and other useful references.

Finally, if you are teaching a course on RF in college or industry, you should look into the supplementary teaching modules developed by the Maricopa Advanced Technology Education Center (www.matec.org). Their RF Modules 104 through 109 include PowerPoint presentations, student activities, and student assessments, which are an excellent supplement to this text and to the lab and activities manual.

I hope you will find this book useful. Let me know how I can improve it for you.

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