Introduction to Semiconductor Manufacturing Technology

9780131911369: Introduction to Semiconductor Manufacturing Technology
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This book is written for technology students taking their first course in semiconductor manufacturing. It contains comprehensive and up-to-date information on this fast-changing industry. The text provides excellent descriptions of semiconductors, advanced manufacturing technologies, and plasma in integrated circuit (IC) processes. It focuses on the newest IC fabrication technologies and also describes older technologies to help the reader understand the development from an historical perspective. The material covered in the text is very close to real fabrication situations.

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Hong Xiao
ISBN 10: 0131911368 ISBN 13: 9780131911369
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