Fabrication Engineering at the Micro and Nanoscale (The ^AOxford Series in Electrical and Computer Engineering) - Softcover

Campbell, Stephen A.

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9780195320176: Fabrication Engineering at the Micro and Nanoscale (The ^AOxford Series in Electrical and Computer Engineering)
Softcover
ISBN 10: 0195320174 ISBN 13: 9780195320176
Publisher: Oxford University Press, 2007

Synopsis

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes.

The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial process simulation suite--the Silvaco Athena® set of codes--to provide meaningful examples of many of the basic processes including diffusion, oxidation, lithography, and deposition.

The book goes on to discuss the integration of these basic unit processes into various technologies, concentrating on CMOS transistors. The text breaks down the material into treatments on the concepts of process modules, thermal budget, advanced architectures, and the use of channel strain for improved performance.

"synopsis" may belong to another edition of this title.

About the Author

Stephen A. Campbell is Professor of Electrical and Computer Engineering at the University of Minnesota, Distinguished Professor of the Institute of Technology, Director of the Nanofabrication Center, and Director of the Center for Nanostructure Applications. He has extensive experience in both academia and industry in microelectronic processing. His current research interests include the application of semiconductor nanoparticles for high performance electronic and optoelectronic devices, advanced materials, novel sensors and transistor structures, and various applications of MEMS.

"About this title" may belong to another edition of this title.

Publisher
Oxford University Press
Publication date
2007
Language
English
ISBN 10 
0195320174
ISBN 13 
9780195320176
Binding
Paperback
Edition number
3
Number of pages
672
Rating
  • 4.06 out of 5 stars
    17 ratings by Goodreads