Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering)

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9780199861224: Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering)

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

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About the Author:


Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.

Review:


"This is one of the best texts in the field. It provides the most complete coverage of fabrication techniques."--Xian-An Cao, West Virginia University


"I like Campbell's style and enjoy reading the text. The material is appropriate for the intended audience and there are good summaries of background material."--Trevor Thornton, Arizona State University


"About this title" may belong to another edition of this title.

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