Chemistry of the Semiconductor Industry

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9780216920057: Chemistry of the Semiconductor Industry
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This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.

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'The style and excellent choice of topics and material covered makes this book an ideal starting point for postgraduates and researchers concerned with semiconductor integrated circuit manufacture.' Chemistry in Britain

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