The Physics of Micro/Nano-Fabrication (Microdevices)

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9780306441462: The Physics of Micro/Nano-Fabrication (Microdevices)

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

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