Ion Implantation

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9780471103110: Ion Implantation
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Focuses on ion implantation as a new means of altering the properties of materials, with an emphasis on the doping of semiconductors through ion implantation. Discusses the problems that occur in a variety of applications, including the electrical activation of implanted ions, diffusion effects, the most common measurement methods for examining implanted layers, and requirements for accelerator equipment.

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Text: English, German (translation)

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