Semiconductor Fabrication: Technology and Metrology (Astm Special Technical Publication)

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9780803112735: Semiconductor Fabrication: Technology and Metrology (Astm Special Technical Publication)
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For the semiconductor industry. Papers cover silicon crystal growth and epitaxial deposition techniques, fabrication technology, microcontamination, metallization and interconnects, material defects and Gettering control charts, standards, and specifications. Annotation copyright Book News, Inc. Portland, Or.

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Published by Astm Intl (1989)
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