Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

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9780815512202: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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"The text provides and excellent reference for plasma processing." - SAMPE Journal

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Rossnagel, Stephen M.; Cuomo, Jerome J.; Westwood, William D.
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ROSSNAGEL, STEPHEN M.; WESTWOOD, WILLIAM D.; CUOMO, JEROME J.
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