Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series) - Softcover

Wasa, Kiyotaka; Hayakawa, Shigeru

Softcover

ISBN 10: 0815512805 ISBN 13: 9780815512806

Publisher: William Andrew, 1993

Synopsis

A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade.

Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

About this title

About the Author

Karen A. Reinhardt is Principle Consultant at Cameo Consulting in San Jose, California. At Cameo Consulting she assists companies investigating and assessing new and unique cleaning technologies that will allow realization of the ITRS roadmap with respect to smaller geometries, new materials, and the environmental issues associated with current cleaning processes. Karen has published over 30 technical papers ranging from plasma processing to damage characterization and cleaning technology assessment. She has been awarded eight patents. Karen formerly co-chaired the ITRS Surface Preparation Technical Working Group. Prior to forming a contracting and consulting company, Karen was employed at Novellus Systems and Advanced Micro Devices. Karen has a BS degree in Chemistry from the University of California at Riverside and a MS degree in Inorganic Chemistry from Texas Tech University.

Review

"àcomprehensively covers state-of-the-art sputtering techniques and equipmentàthoroughly addresses all fundamental aspects." - Materials and Processing Report

Edition details

• Publisher: William Andrew
• Publication date: 1993
• Language: English
• ISBN 10: 0815512805
• ISBN 13: 9780815512806
• Binding: Paperback
• Edition number: 1
• Number of pages: 316