Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology)

0 avg rating
( 0 ratings by Goodreads )
 
9780815512882: Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology)

This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials deposition chemistry, equipment, process technology, developments, and applications are described.

"synopsis" may belong to another edition of this title.

Review:

"After reading this book, an engineer should have all the necessary background." - European Semiconductor

"About this title" may belong to another edition of this title.

Buy New View Book
List Price: US$ 72.95
US$ 61.94

Convert Currency

Shipping: FREE
From United Kingdom to U.S.A.

Destination, Rates & Speeds

Add to Basket

Top Search Results from the AbeBooks Marketplace

1.

John E. J. Schmitz
Published by William Andrew Publishing, United States (1993)
ISBN 10: 0815512880 ISBN 13: 9780815512882
New Hardcover Quantity Available: 1
Seller:
The Book Depository
(London, United Kingdom)
Rating
[?]

Book Description William Andrew Publishing, United States, 1993. Hardback. Book Condition: New. New.. Language: English . Brand New Book. This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials deposition chemistry, equipment, process technology, developments, and applications are described. Bookseller Inventory # AA59780815512882

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 61.94
Convert Currency

Add to Basket

Shipping: FREE
From United Kingdom to U.S.A.
Destination, Rates & Speeds

2.

John E.J. Schmitz
Published by William Andrew (1991)
ISBN 10: 0815512880 ISBN 13: 9780815512882
New Hardcover Quantity Available: 2
Seller:
Revaluation Books
(Exeter, United Kingdom)
Rating
[?]

Book Description William Andrew, 1991. Hardcover. Book Condition: Brand New. 1st edition. 251 pages. 9.50x6.25x1.25 inches. In Stock. Bookseller Inventory # __0815512880

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 58.20
Convert Currency

Add to Basket

Shipping: US$ 7.92
From United Kingdom to U.S.A.
Destination, Rates & Speeds

3.

John E. J. Schmitz
Published by William Andrew Publishing, United States (1993)
ISBN 10: 0815512880 ISBN 13: 9780815512882
New Hardcover Quantity Available: 1
Seller:
The Book Depository US
(London, United Kingdom)
Rating
[?]

Book Description William Andrew Publishing, United States, 1993. Hardback. Book Condition: New. New.. Language: English . Brand New Book. This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials deposition chemistry, equipment, process technology, developments, and applications are described. Bookseller Inventory # AA59780815512882

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 66.16
Convert Currency

Add to Basket

Shipping: FREE
From United Kingdom to U.S.A.
Destination, Rates & Speeds

4.

SCHMITZ, JOHN E.J.
Published by William Andrew (1992)
ISBN 10: 0815512880 ISBN 13: 9780815512882
New Hardcover Quantity Available: 1
Seller:
Herb Tandree Philosophy Books
(Stroud, GLOS, United Kingdom)
Rating
[?]

Book Description William Andrew, 1992. Hardback. Book Condition: NEW. 9780815512882 This listing is a new book, a title currently in-print which we order directly and immediately from the publisher. Bookseller Inventory # HTANDREE0899228

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 59.84
Convert Currency

Add to Basket

Shipping: US$ 10.56
From United Kingdom to U.S.A.
Destination, Rates & Speeds

5.

John E. Schmitz
Published by William Andrew Inc (1992)
ISBN 10: 0815512880 ISBN 13: 9780815512882
New Quantity Available: 2
Seller:
Versandbuchhandlung Kisch & Co.
(Fürstenberg OT Blumenow, Germany)
Rating
[?]

Book Description William Andrew Inc, 1992. Gebundene Ausgabe. Book Condition: Neu. Neu new item; well packed; Neuware; Rechnung mit MwSt.; Bestellungen bis 15 Uhr werden am gleichen Werktag verschickt.This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials deposition chemistry, equipment, process technology, developments, and applications are described.; - This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials deposition chemistry, equipment, process technology, developments, and applications are described. Englisch. Bookseller Inventory # INF1000352147

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 60.48
Convert Currency

Add to Basket

Shipping: US$ 11.71
From Germany to U.S.A.
Destination, Rates & Speeds

6.

John E. J. Schmitz
Published by William Andrew (1992)
ISBN 10: 0815512880 ISBN 13: 9780815512882
New Quantity Available: > 20
Print on Demand
Seller:
Pbshop
(Wood Dale, IL, U.S.A.)
Rating
[?]

Book Description William Andrew, 1992. HRD. Book Condition: New. New Book.Shipped from US within 10 to 14 business days.THIS BOOK IS PRINTED ON DEMAND. Established seller since 2000. Bookseller Inventory # IP-9780815512882

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 72.40
Convert Currency

Add to Basket

Shipping: US$ 3.99
Within U.S.A.
Destination, Rates & Speeds

7.

John E.J. Schmitz
Published by William Andrew (1993)
ISBN 10: 0815512880 ISBN 13: 9780815512882
New Hardcover Quantity Available: 1
Seller:
Ergodebooks
(RICHMOND, TX, U.S.A.)
Rating
[?]

Book Description William Andrew, 1993. Hardcover. Book Condition: New. 1. Bookseller Inventory # DADAX0815512880

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 77.41
Convert Currency

Add to Basket

Shipping: US$ 3.99
Within U.S.A.
Destination, Rates & Speeds

8.

John E.J. Schmitz
Published by William Andrew (1993)
ISBN 10: 0815512880 ISBN 13: 9780815512882
New Hardcover First Edition Quantity Available: 1
Seller:
Irish Booksellers
(Rumford, ME, U.S.A.)
Rating
[?]

Book Description William Andrew, 1993. Hardcover. Book Condition: New. book. Bookseller Inventory # M0815512880

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 81.91
Convert Currency

Add to Basket

Shipping: FREE
Within U.S.A.
Destination, Rates & Speeds

9.

John E. J. Schmitz
Published by William Andrew (1992)
ISBN 10: 0815512880 ISBN 13: 9780815512882
New Quantity Available: > 20
Print on Demand
Seller:
Books2Anywhere
(Fairford, GLOS, United Kingdom)
Rating
[?]

Book Description William Andrew, 1992. HRD. Book Condition: New. New Book. Delivered from our US warehouse in 10 to 14 business days. THIS BOOK IS PRINTED ON DEMAND.Established seller since 2000. Bookseller Inventory # IP-9780815512882

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 75.61
Convert Currency

Add to Basket

Shipping: US$ 11.88
From United Kingdom to U.S.A.
Destination, Rates & Speeds

10.

John E.J. Schmitz
Published by William Andrew (1992)
ISBN 10: 0815512880 ISBN 13: 9780815512882
New Hardcover Quantity Available: 1
Print on Demand
Seller:
Rating
[?]

Book Description William Andrew, 1992. Book Condition: New. This item is printed on demand for shipment within 3 working days. Bookseller Inventory # GM9780815512882

More Information About This Seller | Ask Bookseller a Question

Buy New
US$ 89.58
Convert Currency

Add to Basket

Shipping: US$ 3.51
From Germany to U.S.A.
Destination, Rates & Speeds

There are more copies of this book

View all search results for this book