This specific ISBN edition is currently not available.View all copies of this ISBN edition:
While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences between LVSEM and conventional SEM. Chapters cover the influence of lens aberrations and design on electron-probe formation; the effect of elastic and inelastic scattering processes on electron diffusion and electron range; charging and radiation damage effects; the dependence of SE yield and the backscattering coefficient on electron energy, surface tilt, and material as well as the angular and energy distributions; and types of image contrast and the differences between LVSEM and conventional SEM modes due to the influence of electron-specimen interactions.
- Electron Optics and Instrumentation
- Electron Scattering and Diffusion
- Backscattered and Secondary-Electron Emission
- Specimen Charging and Damage
- Signal Formation and Linage Contrast
- Electron Spectroscopic Methods
"synopsis" may belong to another edition of this title.
Book Description SPIE Press, 1993. Paperback. Condition: New. Seller Inventory # DADAX0819412066
Book Description Society of Photo Optical, 1993. Paperback. Condition: Brand New. 117 pages. 10.00x7.00x0.50 inches. In Stock. Seller Inventory # 0819412066
Book Description SPIE Press, 1993. Paperback. Condition: New. Never used!. Seller Inventory # P110819412066