Image Formation in Low-Voltage Scanning Electron Microscopy (Tutorial Texts in Optical Engineering) - Softcover

Ludwig Reimer

Softcover

ISBN 10: 0819412066 ISBN 13: 9780819412065

Publisher: SPIE--The International Society for Optical Engineering, 1993

Synopsis

While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences between LVSEM and conventional SEM. Chapters cover the influence of lens aberrations and design on electron-probe formation; the effect of elastic and inelastic scattering processes on electron diffusion and electron range; charging and radiation damage effects; the dependence of SE yield and the backscattering coefficient on electron energy, surface tilt, and material as well as the angular and energy distributions; and types of image contrast and the differences between LVSEM and conventional SEM modes due to the influence of electron-specimen interactions. <P> Contents: <BR>- Introduction <BR>- Electron Optics and Instrumentation <BR>- Electron Scattering and Diffusion <BR>- Backscattered and Secondary-Electron Emission <BR>- Specimen Charging and Damage <BR>- Signal Formation and Linage Contrast <BR>- Electron Spectroscopic Methods

Edition details

• Publisher: SPIE--The International Society for Optical Engineering
• Publication date: 1993
• Language: English
• ISBN 10: 0819412066
• ISBN 13: 9780819412065
• Binding: Paperback
• Number of pages: 160