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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39) - Hardcover

Harry J. Levinson; Mark A. McCord; Franco Cerrina; Robert D. Allen; John G. Skinner; Andrew R. Neureuther; Martin C. Peckerar; F. Keith Perkins; Michael J. Rooks

 
9780819423788: Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Hardcover
ISBN 10: 0819423785 ISBN 13: 9780819423788
Publisher: Society of Photo-Optical Instrumentation Engineers, 1997
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Copublished with IEE. The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

Contents

- Preface
- Introduction
- Optical Lithography
- Electron Beam Lithography
- X-ray Lithography
- Deep-UV Resist Technology
- Photomask fabrication procedures and limitations
- Metrology Methods in Photolithography
- Optical Lithography Modeling
- Issues in Nanolithography for Quantum Effect Device Manufacture
- Index

"synopsis" may belong to another edition of this title.

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