Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication (Spie Press Monograph, Pm39-Pm40) - Softcover

Prosenjit Rai-Choudhury

 
9780819423795: Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication (Spie Press Monograph, Pm39-Pm40)

Synopsis

Copublished with IEE. This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.

"synopsis" may belong to another edition of this title.

Other Popular Editions of the Same Title

9780852969106: Handbook of Microlithography, Micromachining and Microfabrication (2-vol set) (Materials and Devices Series)

Featured Edition

ISBN 10:  0852969104 ISBN 13:  9780852969106
Publisher: Institution Of Engineering And T..., 1997
Hardcover