Device and Process Technologies for Mems and Microelectronics: 27-29 October 1999 Royal Pines Resort, Queensland, Australia (Proceedings of Spie)

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9780819434937: Device and Process Technologies for Mems and Microelectronics: 27-29 October 1999 Royal Pines Resort, Queensland, Australia (Proceedings of Spie)
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This selection of papers on microelectromechanical systems (MEMS) and microelectronics explores the device and process technologies used in these disciplines.

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Published by SPIE Press (1999)
ISBN 10: 0819434930 ISBN 13: 9780819434937
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Book Description SPIE Press, 1999. Paperback. Condition: Brand New. 10.50x8.25x1.00 inches. In Stock. Seller Inventory # zk0819434930

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