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The Handbook of Semiconductor Manufacturing Technology describes the individual processes and manufacturing control, support, and infrastructure technologies of silicon-based integrated-circuit manufacturing, many of which are also applicable for building devices on other semiconductor substrates. Discussing ion implantation, rapid thermal processing, photomask fabrication, chip testing, and plasma etching, the editors explore current and anticipated equipment, devices, materials, and practices of silicon-based manufacturing. The book includes a foreword by Jack S. Kilby, cowinner of the Nobel Prize in Physics 2000 "for his part in the invention of the integrated circuit."
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Book Description CRC Press, 2000. Hardcover. Condition: New. Never used!. Seller Inventory # P110824787838
Book Description CRC Press, 2000. Hardcover. Condition: New. Brand New!. Seller Inventory # VIB0824787838
Book Description CRC Press, 2000. Hardcover. Condition: New. 1. Seller Inventory # DADAX0824787838