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Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition - Hardcover

Madou, Marc J.

  • 4.62 out of 5 stars
    13 ratings by Goodreads
 
9780849308260: Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
Hardcover
ISBN 10: 0849308267 ISBN 13: 9780849308260
Publisher: CRC Press, 2002

Synopsis

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition

  • Revised chapters that reflect the many recent advances in the field
  • Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology
  • In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.
  • Many more links to the Web
  • Problem sets in each chapter

    • "synopsis" may belong to another edition of this title.

    About the Author

    University of California, Irvine, USA

    Review

    The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication.
    -Diane Kauzlarick, EET

    "About this title" may belong to another edition of this title.

    Publisher
    CRC Press
    Publication date
    2002
    Language
    English
    ISBN 10 
    0849308267
    ISBN 13 
    9780849308260
    Binding
    Hardcover
    Edition number
    2
    Number of pages
    752
    Rating
    • 4.62 out of 5 stars
      13 ratings by Goodreads