Run-to-Run Control in Semiconductor Manufacturing

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9780849311789: Run-to-Run Control in Semiconductor Manufacturing
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Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

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James Moyne (Editor), Enrique del Castillo (Editor), Arnon M. Hurwitz (Editor)
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Book Description Taylor & Francis Inc, United States, 2000. Hardback. Condition: New. Language: English. Brand new Book. Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. Seller Inventory # BTE9780849311789

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Moyne, James (Editor)/ Del Castillo, Enrique (Editor)/ Hurwitz, Arnon Max (Editor)
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