Run-to-Run Control in Semiconductor Manufacturing

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9780849311789: Run-to-Run Control in Semiconductor Manufacturing
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Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

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Published by CRC Press (2000)
ISBN 10: 0849311780 ISBN 13: 9780849311789
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Book Description Taylor Francis Inc, United States, 2000. Hardback. Condition: New. Language: English . This book usually ship within 10-15 business days and we will endeavor to dispatch orders quicker than this where possible. Brand New Book. Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine runs, thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry s widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. Seller Inventory # BTE9780849311789

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Book Description 2000. Hardcover. Condition: New. 1st. Hardcover. Run-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine runs, thereby minimizing process drift, shift, and variability.Shipping may be from our Sydney, NSW warehouse or from our UK or US warehouse, depending on stock availability. 368 pages. 0.617. Seller Inventory # 9780849311789

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Published by CRC Press (2000)
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