Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
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Book Description Taylor and Francis, 2000. HRD. Book Condition: New. New Book. Shipped from US within 10 to 14 business days. Established seller since 2000. Bookseller Inventory # VT-9780849311789
Book Description CRC Press, 2000. Hardcover. Book Condition: New. book. Bookseller Inventory # 0849311780
Book Description CRC Press, 2000. Hardcover. Book Condition: New. 1. Bookseller Inventory # DADAX0849311780
Book Description CRC Pr I Llc, 2000. Hardcover. Book Condition: Brand New. 1st edition. 348 pages. 9.00x6.00x0.75 inches. In Stock. Bookseller Inventory # 0849311780