Fundamentals of Microfabrication

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9780849394515: Fundamentals of Microfabrication
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Nanotechnology and microengineering are among the top priority research areas in the United States and will continue to be so during the next decade, making Fundamentals of Microfabrication an important and timely work. Written by an internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication, this book will function as both a valuable textbook and a handy reference.
Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.

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University of California, Irvine, USA

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"... the alpha and omega textbook of micro and nanofabrication and technology. ... Madou’s explanations often provide new perspectives to those who are more experienced. ... this feat of compressing a half century of science and engineering into one set of books makes them useful for years to come. The volumes can easily and aptly serve as course resources for students or as reference books for professionals. Summing Up: Recommended."
―CHOICE Magazine

"... offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."
―Suman Chakraborty, IIT Kharagpur, India

"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."
―Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland

"... [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor... easy to read, and I found some concepts explained in ways I hadn’t heard before... Very ambitious, very informative, very good for teaching!"
―Jorg P. Kutter, Technical University of Denmark

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