Fabrication of GaAs Devices

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9780863413537: Fabrication of GaAs Devices
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This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching.

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The authors are with Sandia National Laboratories.

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C. Ashby A. Baca
Published by The Institution of Engineering and Technology 2005-09-30 (2005)
ISBN 10: 0863413536 ISBN 13: 9780863413537
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Baca, A., Ashby, C.
Published by The Institution of Engineering (2005)
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