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This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching.
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The authors are with Sandia National Laboratories.
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Book Description The Institution of Engineering and Technology 2005-09-30, 2005. Hardcover. Condition: New. 0863413536. Seller Inventory # 536159
Book Description The Institution of Engineering, 2005. Hardcover. Condition: New. Never used!. Seller Inventory # P110863413536