Chemical Vapor Deposition (Surface Engineering Series, V. 2)

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9780871707314: Chemical Vapor Deposition (Surface Engineering Series, V. 2)
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This handbook provides guidelines and practical information on the chemical vapor deposition (CVD) process for surface engineering design, product development, and manufacturing. The first of the 14 chapters discuss the basic principles of CVD thermodynamics and kinetics, stresses and mechanical sta

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