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The companion volumes to this book are Volume 1- Process Technology and Volume 3- The Submicron MOSFET
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- PublisherLattice Pr
- Publication date1990
- ISBN 10 0961672145
- ISBN 13 9780961672140
- BindingHardcover
- Edition number5
- Number of pages752
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Silicon Processing for the VLSI Era, Vol. 2: Process Integration
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(1990)
ISBN 10: 0961672145
ISBN 13: 9780961672140
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