Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 (MRS Proceedings)

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9781107413214: Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 (MRS Proceedings)

Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing.

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Published by CAMBRIDGE UNIVERSITY PRESS, United Kingdom (2014)
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Book Description CAMBRIDGE UNIVERSITY PRESS, United Kingdom, 2014. Paperback. Book Condition: New. Language: English . Brand New Book ***** Print on Demand *****. Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing. Bookseller Inventory # AAV9781107413214

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Published by CAMBRIDGE UNIVERSITY PRESS, United Kingdom (2014)
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Book Description CAMBRIDGE UNIVERSITY PRESS, United Kingdom, 2014. Paperback. Book Condition: New. Language: English . Brand New Book ***** Print on Demand *****.Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing. Bookseller Inventory # AAV9781107413214

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Book Description Cambridge University Press 6/5/2014, 2014. Paperback or Softback. Book Condition: New. Materials Science of Microelectromechanical Systems (Mems) Devices II: Volume 605. Book. Bookseller Inventory # BBS-9781107413214

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Book Description Cambridge University Press, 2014. PAP. Book Condition: New. New Book. Delivered from our UK warehouse in 4 to 14 business days. THIS BOOK IS PRINTED ON DEMAND. Established seller since 2000. Bookseller Inventory # IQ-9781107413214

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Edited by Maarten P. de Boer , Arthur H. Heuer , S. Joshua Jacobs , Eric Peeters
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Book Description Cambridge University Press, 2014. Paperback. Book Condition: Brand New. 1st edition. 334 pages. 9.02x5.98x0.71 inches. In Stock. Bookseller Inventory # __1107413214

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Book Description Cambridge University Press. Paperback. Book Condition: New. 334 pages. Dimensions: 9.0in. x 6.0in. x 0.7in.Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing. This item ships from multiple locations. Your book may arrive from Roseburg,OR, La Vergne,TN. Paperback. Bookseller Inventory # 9781107413214

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EDITED BY MAARTEN P. DE BOER , ARTHUR H. HEUER , S. JOSHUA JACOBS , ERIC PEETERS
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