Introductory MEMS: Fabrication and Applications

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9781489984210: Introductory MEMS: Fabrication and Applications
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This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.

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Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.

Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

 

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Other Popular Editions of the Same Title

9780387095103: Introductory MEMS: Fabrication and Applications

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ISBN 10:  0387095101 ISBN 13:  9780387095103
Publisher: Springer, 2009
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9788132206637: Introductory Mems: Fabrication And Applications

Springer, 2014
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Book Description Springer-Verlag New York Inc., United States, 2014. Paperback. Condition: New. 2010 ed. Language: English. Brand new Book. Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines. Seller Inventory # AAV9781489984210

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Thomas M. Adams, Richard A. Layton
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Book Description Springer-Verlag New York Inc., United States, 2014. Paperback. Condition: New. 2010 ed. Language: English. Brand new Book. Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines. Seller Inventory # LIE9781489984210

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Thomas M. Adams, Richard A. Layton
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Book Description Springer-Verlag New York Inc., United States, 2014. Paperback. Condition: New. 2010 ed. Language: English. Brand new Book. Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines. Seller Inventory # AAV9781489984210

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