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Ion-Solid Interactions for Materials Modification and Processing: Volume 396 (MRS Proceedings) - Hardcover
Several beam-solid interaction techniques have been developed that can either stand alone or be used in connection with others for materials processing, for fabrication of devices with enhanced electro-optical and mechanical properties, and with enhanced resistance to corrosion and erosion. For example, advances in focused ion beams (FIB) have brought out-of-reach ideas and applications to fruition. This book from MRS focuses on the developments in ion-beam-assisted processing of materials and reviews successful applications of the techniques. Topics include: fundamentals of ion-solid interactions; ion-beam mixing; radiation damage; insulators and wide bandgap materials; polymers; optical materials; plasma and ion-assisted techniques; metals and tribology; focused ion beams; fundamental semiconductor processing and compound semiconductors.
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- PublisherMaterials Research Society
- Publication date1996
- ISBN 10 1558992995
- ISBN 13 9781558992993
- BindingHardcover
- Edition number1
- Number of pages900
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Ion-Solid Interactions for Materials Modification and Processing (Materials Research Society Symposia Proceedings, Volume 396)
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Materials Research Society
(1996)
ISBN 10: 1558992995
ISBN 13: 9781558992993
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Ion-Solid Interactions for Materials Modification and Processing: Volume 396 (MRS Proceedings)
Published by
Materials Research Society
(1996)
ISBN 10: 1558992995
ISBN 13: 9781558992993
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Ion-Solid Interactions Materls V396 Hb
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