Handbook of Semiconductor Manufacturing Technology - Hardcover

Hardcover

ISBN 10: 1574446754 ISBN 13: 9781574446753

Publisher: CRC Press, 2007

Synopsis

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available.

Stay Current with the Latest Technologies
In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on…

Silicon-on-insulator (SOI) materials and devices

Supercritical CO2 in semiconductor cleaning

Low-κ dielectrics

Atomic-layer deposition

Damascene copper electroplating

Effects of terrestrial radiation on integrated circuits (ICs)

Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication.

While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

About this title

About the Author

Nishi, Yoshio; Doering, Robert

Edition details

• Publisher: CRC Press
• Publication date: 2007
• Language: English
• ISBN 10: 1574446754
• ISBN 13: 9781574446753
• Binding: Hardcover
• Edition number: 2
• Number of pages: 1720
• Editor: Nishi Yoshio, Doering Robert