MEMS Mechanical Sensors - Hardcover

Steve P. Beeby; Graham Ensel; Michael Kraft

Hardcover

ISBN 10: 1580535364 ISBN 13: 9781580535366

Publisher: Artech House Publishers, 2004

Synopsis

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

About this title

About the Author

Neil White is professor of intelligent sensor systems at the School of Electronics and Computer Science, University of Southampton, U.K. A fellow of the Institution of Electrical Engineers (IEE) and the Institute of Physics (IOP), as well as a senior member of the IEEE, he earned B.Sc. in electronics engineering at North Staffs Polytechnic and a Ph.D. in sensors at the University of Southampton.

Michael Kraft is a lecturer in the School of Electronics and Computer Science, University of Southampton. He holds a Dipl-Ing degree in electronics form Alexander von Humboldt University, Erlangen, Germany, and a Ph.D. in electronics and control from Coventry University, Coventry, U.K.

Steven P. Beeby is an advanced research fellow at the School of Electronics and Computer Science, University of Southampton. He holds an Eng. (Hons) degree in mechanical engineering from the University of Portsmouth, U.K. and a Ph.D. in mechanical Engineering from the University of Southampton.

Graham Ensel is a senior research fellow at the University of Southampton. He received his B.Sc. in physics from the Imperial College, London University and his Ph.D. in medical physics from the Royal Free Medical School, University of London.

Edition details

• Publisher: Artech House Publishers
• Publication date: 2004
• Language: English
• ISBN 10: 1580535364
• ISBN 13: 9781580535366
• Binding: Hardcover
• Number of pages: 282