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Nanoimprint Lithography: Principles, Processes and Materials (Nanotechnology Science and Technology) - Softcover
Synopsis
Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nanofabrication technologies and manufacturing of Integrated Circuits (IC). This book gives fresh insight to NIL, one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures.
"synopsis" may belong to another edition of this title.
- PublisherNova Science Pub Inc
- Publication date2011
- ISBN 10 1611225019
- ISBN 13 9781611225013
- BindingPaperback
- LanguageEnglish
- Number of pages73
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Nanoimprint Lithography
Published by
Nova Science Publishers, Incorporated, 2011
ISBN 10: 1611225019
ISBN 13: 9781611225013
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Nanoimprint Lithography
Published by
Nova Science Publishers, Incorporated, 2011
ISBN 10: 1611225019
ISBN 13: 9781611225013
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Nanoimprint Lithography
Published by
Nova Science Publishers, Incorporated, 2011
ISBN 10: 1611225019
ISBN 13: 9781611225013
New
Softcover
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Nanoimprint Lithography: Principles, Processes and Materials
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Nanoimprint Lithography: Principles, Processes and Materials (Nanotechnology Science and Technology)
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