Synopsis
Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.
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Ion Sources
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Ion Sources
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Condition: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processingIncludes supplementary material: sn.pub/extrasWhile dealing with the . Seller Inventory # 5047542
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Ion Sources
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Springer Berlin Heidelberg Dez 2010, 2010
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Taschenbuch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -While dealing with the design and operation of ion sources, this book additionally discusses the physics of ion formation of the various elements with different charge states and charge neutralization. Ion selection and beam diagnostics are equally included, and the presentation of the necessary equations and diagrams for the various parameters makes this a useful handbook for ion sources. 496 pp. Englisch. Seller Inventory # 9783642085024
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Ion Sources
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Taschenbuch. Condition: Neu. Ion Sources | Huashun Zhang | Taschenbuch | xviii | Englisch | 2010 | Springer | EAN 9783642085024 | Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu. Seller Inventory # 107175145
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Ion Sources
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Springer Berlin Heidelberg, Springer Berlin Heidelberg Dez 2010, 2010
ISBN 10: 3642085024
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Taschenbuch. Condition: Neu. This item is printed on demand - Print on Demand Titel. Neuware -Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg 496 pp. Englisch. Seller Inventory # 9783642085024
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Taschenbuch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources. Seller Inventory # 9783642085024
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Condition: New. Print on Demand pp. 496 49:B&W 6.14 x 9.21 in or 234 x 156 mm (Royal 8vo) Perfect Bound on White w/Gloss Lam. Seller Inventory # 5429771
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Condition: New. PRINT ON DEMAND pp. 496. Seller Inventory # 182450910
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