1. Introduction.- 2. Electron Optics of a Scanning Electron Microscope.- 3. Electron Scattering and Diffusion.- 4. Emission of Electrons and X-Ray Quanta.- 5. Detectors and Signal Processing.- 6. Imaging with Secondary and Backscattered Electrons.- 7. Electron-Beam-Induced Current, Cathodoluminescence and Special Techniques.- 8. Crystal Structure Analysis by Diffraction.- 9. Elemental Analysis and Imaging with X-Rays.- References.
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"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."
T Mulvey, Measurement Science and Technology. 11, No12, December 2000
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