Germanium Surface Preparation Methods: Germanium Surface Cleaning and Preparation Methods for Semiconductor Applications

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9783836484114: Germanium Surface Preparation Methods: Germanium Surface Cleaning and Preparation Methods for Semiconductor Applications

Germanium is gaining interest in the semiconductor industry as a replacement channel material for high mobility applications. Contamination directly affects the device performance, yield and reliability. Therefore, continued device scaling is dependent on effective surface preparation including effective contamination and particle removal of germanium surface. Cleaning and preparation methods for silicon surface have been extensively developed over the past few decades. Germanium surface cleaning and preparation is at its infancy and is markedly different from that of silicon. This book examines these differences and fundamentals involved in germanium surface cleaning. This book also proposes methods for basic germanium surface cleaning and the basis for further process development for professionals involved in surface cleaning of semiconductor materials.

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About the Author:

Jungyup Kim, Ph.D : Studied Materials Science and Engineering under Dr. Yoshio Nishi at Stanford University. Experiences include process engineer at Samsung Electronics.

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Kim, Jungyup
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Book Description Book Condition: New. Publisher/Verlag: VDM Verlag Dr. Müller | Germanium Surface Cleaning and Preparation Methodsfor Semiconductor Applications | Germanium is gaining interest in the semiconductorindustry as a replacement channel material for highmobility applications. Contamination directlyaffects the device performance, yield andreliability. Therefore, continued device scaling isdependent on effective surface preparation includingeffective contamination and particle removal ofgermanium surface. Cleaning and preparation methodsfor silicon surface have been extensively developedover the past few decades. Germanium surfacecleaning and preparation is at its infancy and ismarkedly different from that of silicon. This bookexamines these differences and fundamentals involvedin germanium surface cleaning. This book alsoproposes methods for basic germanium surfacecleaning and the basis for further processdevelopment for professionals involved in surfacecleaning of semiconductor materials. | Format: Paperback | Language/Sprache: english | 154 gr | 220x150x5 mm | 104 pp. Bookseller Inventory # K9783836484114

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Book Description VDM Verlag Dr. Mueller e.K., Germany, 2008. Paperback. Book Condition: New. Language: English . Brand New Book ***** Print on Demand *****.Germanium is gaining interest in the semiconductor industry as a replacement channel material for high mobility applications. Contamination directly affects the device performance, yield and reliability. Therefore, continued device scaling is dependent on effective surface preparation including effective contamination and particle removal of germanium surface. Cleaning and preparation methods for silicon surface have been extensively developed over the past few decades. Germanium surface cleaning and preparation is at its infancy and is markedly different from that of silicon. This book examines these differences and fundamentals involved in germanium surface cleaning. This book also proposes methods for basic germanium surface cleaning and the basis for further process development for professionals involved in surface cleaning of semiconductor materials. Bookseller Inventory # AAV9783836484114

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Book Description VDM Verlag. Paperback. Book Condition: New. 104 pages. Dimensions: 8.9in. x 6.0in. x 0.2in.Germanium is gaining interest in the semiconductor industry as a replacement channel material for high mobility applications. Contamination directly affects the device performance, yield and reliability. Therefore, continued device scaling is dependent on effective surface preparation including effective contamination and particle removal of germanium surface. Cleaning and preparation methods for silicon surface have been extensively developed over the past few decades. Germanium surface cleaning and preparation is at its infancy and is markedly different from that of silicon. This book examines these differences and fundamentals involved in germanium surface cleaning. This book also proposes methods for basic germanium surface cleaning and the basis for further process development for professionals involved in surface cleaning of semiconductor materials. This item ships from multiple locations. Your book may arrive from Roseburg,OR, La Vergne,TN. Paperback. Bookseller Inventory # 9783836484114

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Book Description VDM Verlag. PAPERBACK. Book Condition: New. 3836484110 Special order direct from the distributor. Bookseller Inventory # ING9783836484114

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Book Description VDM Verlag, 2008. Paperback. Book Condition: New. book. Bookseller Inventory # M3836484110

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