Amorphous Silicon Carbide Thin Films: Deposition, Characterization, Etching, and Piezoresistive Sensors Applications

Fraga, Mariana Amorim

ISBN 10: 1613247745 / ISBN 13: 9781613247747
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Synopsis: Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterisation and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.

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Title: Amorphous Silicon Carbide Thin Films: ...
Publication Date: 2012
Binding: PAP
Book Condition: New

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Book Description Nova Science Publishers Inc, United States, 2012. Paperback. Condition: New. UK ed.. Language: English . Brand New Book. Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications. Seller Inventory # AAG9781613247747

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Book Description Nova Science Publishers Inc, United States, 2012. Paperback. Condition: New. UK ed.. Language: English . Brand New Book. Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications. Seller Inventory # AAG9781613247747

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