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Fundamental Principles Of Engineering Nanometrology (Micro And Nano Technologies)

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ISBN 10: 0080964540 / ISBN 13: 9780080964546
New Condition: New Hardcover
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Bibliographic Details

Title: Fundamental Principles Of Engineering ...

Binding: Hardcover

Book Condition:New

About this title

Synopsis:

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

  • Provides a basic introduction to measurement and instruments 
  • Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
  • Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments)
  • Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
  • Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

About the Author:

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

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