A Guide to Hands-on MEMS Design and Prototyping

Joel A. Kubby

Published by Cambridge University Press, 2011
ISBN 10: 0521889251 / ISBN 13: 9780521889254
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Synopsis: Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

Book Description: Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide. You will also learn to use foundry multi-project fabrication processes for low-cost MEMS projects, and end-of-chapter exercises and design challenges are provided, making this ideally suited for use in the classroom and by practising engineers.

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Title: A Guide to Hands-on MEMS Design and ...
Publisher: Cambridge University Press
Publication Date: 2011
Binding: Hardcover
Book Condition: Used: Good

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Book Description CAMBRIDGE UNIVERSITY PRESS, United Kingdom, 2011. Hardback. Book Condition: New. Language: English . Brand New Book. Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There s also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online. Bookseller Inventory # AAA9780521889254

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Book Description CAMBRIDGE UNIVERSITY PRESS, United Kingdom, 2011. Hardback. Book Condition: New. Language: English . Brand New Book. Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There s also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online. Bookseller Inventory # AAA9780521889254

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