Title: Handbook of Microlithography, Micromachining and Microfabrication Volume 1: Microlithography
Publisher: Institution Of Engineering And Technology
Publication Date: 1997
Language: English
ISBN 10: 0852969066
ISBN 13: 9780852969069
Binding: Hardcover
Condition: Brand New

About this title

Synopsis

This authoritative handbook provides a comprehensive resource for process development and training, in both the microelectronics device manufacturing field and newer application areas, such as sensors, actuators and biomedical devices. The handbook is written by leading experts in the field, and may be used as a reference or text by researchers and engineers who are not expert in the area as well as a good reference for those who are.

Also available:

Electrical Degradation and Breakdown in Polymers - ISBN 9780863411960
Physics and Technology of Hetrojunction Devices - ISBN 9780863412042

The Institution of Engineering and Technology is one of the world's leading professional societies for the engineering and technology community. The IET publishes more than 100 new titles every year; a rich mix of books, journals and magazines with a back catalogue of more than 350 books in 18 different subject areas including:

-Power & Energy
-Renewable Energy
-Radar, Sonar & Navigation
-Electromagnetics
-Electrical Measurement
-History of Technology
-Technology Management

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