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Handbook of Semiconductor Manufacturing Technology, Second Edition

Yoshio Nishi and Robert Doering

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ISBN 10: 1574446754 / ISBN 13: 9781574446753
Published by CRC Press, 2007
New Condition: New Hardcover
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Bibliographic Details

Title: Handbook of Semiconductor Manufacturing ...

Publisher: CRC Press

Publication Date: 2007

Binding: Hardcover

Book Condition:New

Edition: 2.

About this title

Synopsis:

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available.

Stay Current with the Latest Technologies
In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on...

  • Silicon-on-insulator (SOI) materials and devices
  • Supercritical CO2 in semiconductor cleaning
  • Low-κ dielectrics
  • Atomic-layer deposition
  • Damascene copper electroplating
  • Effects of terrestrial radiation on integrated circuits (ICs)

    Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication.

    While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
  • About the Author:

    Texas Instruments, Dallas, USA Stanford University, California, USA

    "About this title" may belong to another edition of this title.

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