Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)

Thompson, L.F., C.G. Willson, and M.J. Bowden, editors

ISBN 10: 0841207755 / ISBN 13: 9780841207752

Published by American Chemical Society, 1983

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Bibliographic Details

• Title: Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)
• Publisher: American Chemical Society
• Publication Date: 1983
• Language: English
• ISBN 10: 0841207755
• ISBN 13: 9780841207752
• Binding: Hardcover
• Condition: Good

About this title

Synopsis

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.