An Introduction to Surface-Micromachining (Information Technology: Transmission, Processing & Storage)

Johnstone, Robert W.; Parmaswaran, Ash

ISBN 10: 1402080204 / ISBN 13: 9781402080203

Published by Springer, 2004

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Bibliographic Details

• Title: An Introduction to Surface-Micromachining (Information Technology: Transmission, Processing & Storage)
• Publisher: Springer
• Publication Date: 2004
• Language: English
• ISBN 10: 1402080204
• ISBN 13: 9781402080203
• Binding: Hardcover
• Condition: New

About this title

Synopsis

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.