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Lithography

Wiley-ISTE

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ISBN 10: 184821202X / ISBN 13: 9781848212022
Published by Wiley-ISTE, 2010
Condition: Good Hardcover
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Bibliographic Details

Title: Lithography

Publisher: Wiley-ISTE

Publication Date: 2010

Binding: Hardcover

Book Condition: Good

Edition: 1.

About this title

Synopsis:

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.

This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

About the Author:

Stefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education.

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