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MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering

Tai-Ran Hsu

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ISBN 10: 0470083018 / ISBN 13: 9780470083017
Published by Wiley, 2008
Used Condition: Used: Good Hardcover
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Bibliographic Details

Title: MEMS & Microsystems: Design, Manufacture, ...

Publisher: Wiley

Publication Date: 2008

Binding: Hardcover

Book Condition:Used: Good

About this title

Synopsis:

Technology/Engineering/Mechanical

A bestselling MEMS text...now better than ever.

An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering.

Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances.

Other highlights of the Second Edition include:
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Expanded coverage of microfabrication plus assembly and packaging technologies
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The introduction of microgyroscopes, miniature microphones, and heat pipes
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Design methodologies for thermally actuated multilayered device components
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The use of popular SU-8 polymer material

Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.

About the Author:

Tai-Ran Hsu, PhD, is a Professor in the Department of Mechanical and Aerospace Engineering, San Jose State University, California. Dr. Hsu is the author of the earlier edition of this book, which is considered one of the bestselling textbooks on the subject of MEMS.

"About this title" may belong to another edition of this title.

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