MEMS/NEMS Sensors: Fabrication and Application (Paperback or Softback)
Koley, Goutam
Sold by BargainBookStores, Grand Rapids, MI, U.S.A.
AbeBooks Seller since January 23, 2002
New - Soft cover
Condition: New
Quantity: 5 available
Add to basketSold by BargainBookStores, Grand Rapids, MI, U.S.A.
AbeBooks Seller since January 23, 2002
Condition: New
Quantity: 5 available
Add to basketMEMS/NEMS Sensors: Fabrication and Application.
Seller Inventory # BBS-9783039216345
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.
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