Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Volume 687 (MRS Proceedings)

Published by Cambridge University Press, 2002
ISBN 10: 1558996230 / ISBN 13: 9781558996236
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Synopsis: Microelectromechanical systems (MEMS) has been able to successfully acceded to several markets, including pressure sensors, gyroscopes, accelerometers, fluidics and data storage, representing a total revenue of some $2 billion in 2000. However, MEMS has the potential to offer reliable and cost-effective solutions to many other fields. The current expectation is that we will witness the appearance of diverse MEMS structures for power generation, propulsion, biomedical applications, optical switching, infrared sensing, microphones and displays, to name just a few. This plethora of activity is possible due to the increased understanding of the properties of the micromanufacturing materials involved, the availability of processing equipment with enhanced capabilities, and the effort of a large number of researchers and scientists. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures. Topics include: applications metrology; mechanical properties; microstructure and processing; applications; processing techniques; alternative materials; and surface engineering issues in MEMS structures and devices.

Book Description: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures.

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Title: Materials Science of Microelectromechanical ...
Publisher: Cambridge University Press
Publication Date: 2002
Book Condition: Very Good

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Ayon, Arturo A., Buchheit, Thomas E., Kahn, Harold, Spearing, S. Mark, eds.
Published by Materials Research Society (2002)
ISBN 10: 1558996230 ISBN 13: 9781558996236
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Book Description Materials Research Society, 2002. Book Condition: Good. 334 pp., Hardcover, ex library else text clean and binding tight. Bookseller Inventory # ZB1001367

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Editor-A. A. Ayon; Editor-T. Buchheit; Editor-H. Kahn; Editor-S. M. Spearing
Published by Materials Research Society (2002)
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Arturo A Ayon, Thomas E. Buchheit , Harold Kahn, S. Mark Spearing (editors)
Published by Materials Research Society, Warrendale, Pennsylvania, U.S.A. (2002)
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Book Description Materials Research Society, Warrendale, Pennsylvania, U.S.A., 2002. Hard Cover. Book Condition: Good. No Jacket. Hard cover. Usual ex-library features. Interior is clean and tight. Binding is good. Cover shows slight wear. Library label is on spine. Illustrated throughout. 315 pages. Ex-Library. Bookseller Inventory # 107724

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